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wafer transport zone definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
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in modular equipment, the
area
of the
interface plane
that is free of physical obstructions and reserved for
wafer
movement between modules. [SEMI E21-94] Also see
cluster
tool
.
See also:
wavelength definition
weak bases definition
voltage (V) definition
void definition
water bath definition
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