Periodic Table
-
Chemistry Definitions
-
Test your knowledge
-
Add to Favorites
-
Useful Resources
-
Link to Us
wafer transport plane definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
in modular equipment, the horizontal
surface
that a
wafer
traverses between modules. [SEMI E21-94] Also see
cluster
tool
.
See also:
warm-up time definition
watt (W) definition
wafer sort definition
well definition
wire-connected interface definition
© 1999-2007 ChemiPlus.net |
About us
|
Contact us