Periodic Table
-
Chemistry Definitions
-
Test your knowledge
-
Add to Favorites
-
Useful Resources
-
Link to Us
wafer transport axis definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
the
center line
of
transport module
end
effector motion. This
center line
is symmetric with the
wafer
transport zone. [SEMI E22-91]
See also:
wafer transfer definition
wafer, virgin test definition
Walsh diagram definition
wafer-level reliability definition
wafer process chamber (WPC) definition
© 1999-2007 ChemiPlus.net |
About us
|
Contact us