Add to Del.icio.us Add to Reddit Post to Digg Submit to Newsvine Store at Furl Add to Yahoo Myweb Post to Stumbleupon Post to Google


Periodic Table - Chemistry Definitions - Test your knowledge - Add to Favorites - Useful Resources - Link to Us

wafer transport axis definition

 A  B  C  D  E  F  G  H  I  J  K  L  M  N  O  P  Q  R  S  T  U  V  W  X  Y  Z

 


the center line of transport module end effector motion. This center line is symmetric with the wafer transport zone. [SEMI E22-91]

See also:

wafer transfer definition
wafer, virgin test definition
Walsh diagram definition
wafer-level reliability definition
wafer process chamber (WPC) definition