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wafer transfer chamber (WTC) definition

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the chamber(s) within the process equipment in which wafers are transferred either from a cleanroom interface chamber or load lock to any process or pre-/post-process treatment chamber. The WTC may also be a chamber used for temporary wafer staging or storage. No wafer processing is performed within the WTC.

See also:

virtual semiconductor device definition
W-bit (wait-bit) definition
wet chemical etch definition
well definition
Weak Electrolyte definition