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wafer process chamber (WPC) definition
A
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C
D
E
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H
I
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N
O
P
Q
R
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the chamber(s) within the
process
equipment
in which wafers are processed. A
process
chamber interfaces with any or all of the
cleanroom
interface
chambers,
wafer
treatment chambers, and pre- or post-process treatment chambers.
See also:
Vickers hardness number (VHN) definition
Weighing definition
wafer definition
Wedge Projection definition
waves definition
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