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wafer plane offset definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
in a
wafer
carrier
pocket, the distance from the
pocket center plane
to the center of the
wafer
zone. The
offset
from the
pocket center plane
toward datum A is a negative value. [SEMI E1.9-94]
See also:
Voltammetry definition
white arsenic definition
weak bases definition
Wheland intermediate definition
wafer-level reliability definition
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