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wafer interface line definition
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in wafer transport equipment, the intersection of a side that contains a port (or an extension from such a side) and the wafer interface plane . An extension from a side is in 75-mm (approximately 2.95 in) multiples and applies to the distance between the front and rear wafer interface lines and to the center lines of input and output ports. [Adapted from SEMI E8-92]

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