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ultrashallow junction definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
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dopant
junction
in silicon in which the
junction
is less than 100
nm
deep.
See also:
ultrapure water (UPW) definition
-value (rho-value) definition
vapor phase reflow definition
user definition
velocity definition
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