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tungsten hexafluoride (WF6) definition
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a colorless, odorless
gas
or a light yellow
liquid
. Tungsten hexafluoride is used to deposit tungsten
silicide
during chemical
vapor
deposition
. It also is used in the formation of tungsten conductive films. [SEMI C326-89]
See also:
TXRF definition
vena contracta definition
unscheduled downtime state definition
TWA definition
tweak definition
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