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trapped charges definition

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charges trapped either in the gate oxide or, in the case of a lightly doped drain (LDD) metal-oxide semiconductor field-effect transistor (MOSFET), in the spacer region. Trapped charges in the gate or the spacer lead to threshold voltage shift or to transconductance degradation, respectively.

See also:

total thickness variation (TTV) definition
total indicator runout (TIR) definition
Traralgon definition
Transition element definition
total thickness variation (TTV) definition