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tool definition

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1 : an instrument, machine, or device used to perform a task or to measure a characteristic or quality. 2 : any piece of semiconductor fabrication or inspection equipment designed to process wafers delivered in cassettes or cassettes in containers intended for use with an automated material transport system. [SEMI E15-91]

See also:

Thermal analysis (introduction) definition
thin film packaging definition
tool definition
thick film definition
thermopneumatic detector definition