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throughput definition
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the number of wafers per hour through a machine, assuming 100%
equipment uptime
and a fully loaded machine. The number is adjusted downward for any detracting factors one wants to consider (for example, downtime, setup time, idle time, etc.)
See also:
tip definition
thermocouple (TC) definition
thioaldehyde S-oxides definition
tilt definition
thermal transient testing definition
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