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thickness definition

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1 : of an epitaxial layer, the distance from the surface of the wafer to the layer-substrate interface. [SEMI M2-94 and ASTM F1241] 2 : of a semiconductor wafer, the distance through the wafer between corresponding points on the front and back surfaces. [ASTM F1241]

See also:

theoretical cycle time definition
Thermogravimetry (TG) definition
tooling definition
time-of-flight (TOF) definition
Thermal Cracking definition