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support tool definition
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a mechanical
device
that, although not a part of a piece of equipment, is required by it and becomes integral with it during the course of normal
operation
. Examples include
wafer
carriers, boats, and
probe
cards. [SEMI E10-92]
See also:
sultones definition
subjacent orbital definition
sulfonediimines definition
stripper definition
Supercooled Liquids definition
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