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stylus method surface roughness measuring instrument definition

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in the roughness measurement of flat panel display substrate surfaces, an instrument that traces on a section of a surface with a stylus, records irregularity on the surface in an enlarged form, and indicates irregularity amplitude as roughness parameters. [SEMI D7-94]

See also:

Strong Electrolyte definition
superionic materials definition
sulfonic acids definition
surface defects definition
submicrometer process definition