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step coverage definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
the
ratio
of
thickness
of
film
along the walls of a
step
to the
thickness
of the
film
at the bottom of a
step
. Good
step
coverage reduces electromigration and high-resistance pathways.
See also:
steady state (or stationary state) definition
stopband definition
standardized test software definition
static pressure (SP) definition
stoichiometric number definition
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