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1 : a solution applied to a cross-sectioned silicon device to reveal the location of various structures. 2 : contaminant in the form of streaks that are chemical in nature and cannot be removed except through further lapping or polishing. Examples are "white" stains that are seen after chemical etching as white or brown streaks. [SEMI Materials, Vol. 3, Definitions for Semiconductor Materials] 3 : a two-dimensional, contaminating foreign substance on a component surface. Also see contamination and foreign material. 4 : in flat panel display substrates, any erosion of the surface; generally cloudy in appearance, it sometimes exhibits apparent color. [SEMI D9-94] 5 : area contamination that is chemical in nature and cannot be removed except through further lapping or polishing. [ASTM F1241]
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