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sori definition

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the difference between the maximum and minimum distances between a front-side reference plane and the surface of a wafer that is not chucked. The reference plane is chosen either as a means of minimizing the difference (sori) or as a least-squares fit to the front surface. [SEMI M1-90]

See also:

Soret band definition
Square Planar Complex definition
SOS definition
sort yield definition
species definition