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slot group definition
A
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D
E
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R
S
T
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in
cluster
tools, a logical collection of slots within a
cassette
module
. A
slot
group, in general, corresponds to a carrier, containing the same number of slots as there are
carrier
locations in the corresponding
carrier
.
See also:
silylation definition
software interlock definition
smectic definition
silicon on insulator (SOI) definition
slip definition
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