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silicon source gas definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
on a wafer, volatile or gaseous silicon compounds used as the
epitaxial
layer
of
material
deposited. [SEMI M4-88] Also see epitaxy.
See also:
solvent polarity definition
Site-directed mutagenesis definition
Solid-state band theory definition
soft acid definition
silicon (Si) definition
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