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silicon on insulator (SOI) definition

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a novel substrate for high-performance, low-power, and radiation-hard CMOS applications that offers process simplification, improved scalability, latch-up free and soft-error free operation, improved subthreshold slope, and drastic reduction in parasitic capacitances. At this writing, there are two manufacturing-oriented techniques to build SOI: SIMOX and bonded.

See also:

slot spacing definition
soft base definition
solvent isotope effect definition
SOI definition
slave definition