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shallow etch pits definition
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on a wafer,
etch
pits that are small and shallow in depth under high magnification greater than 200X. [ASTM F1241] Also called saucer pits. Also see
haze
.
See also:
SIA definition
Siderophore definition
SemiSPIN definition
Semiconductor Industry Association (SIA) definition
self-consistent top-down design definition
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