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alignment pocket definition
benchmarks definition
cause-and-effect diagram definition
cluster controller definition
cluster module definition
cluster tool definition
cluster tool recipe definition
contamination definition
daisy chained definition
design tool definition
diamond anvil definition
EMO interface definition
facilities cost model (FCM) definition
factory layout/relayout tool definition
FLRT definition
Gantt chart definition
global orientation definition
in situ measurement definition
Infrared absorption spectroscopy (IR) definition
inline measurement definition
integrated minienvironment definition
integrated standard mechanical interface (SMIF) definition
interactive design definition
intertool port resource definition
intrabay automated material handling system definition
intratool communications interface definition
intratool transport definition
life cycle definition
load face plane definition
load height definition
load lock definition
material transport module definition
mechanical characterization definition
modeling definition
module definition
overcut definition
particles per wafer pass (PWP) definition
PERT chart definition
placement tolerance definition
point of use (POU) definition
port definition
port resource server definition
process characterization definition
process module controller definition
process module definition
process program definition
quadrupole definition
quadrupole mass filter definition
radial cluster tool definition
reach definition
resolution dagger definition
specification definition
SPIDER definition
support tool definition
tool definition
tool suite definition
tool-to-tool automated material handling system definition
transport module controller definition
transport module definition
transport server definition
vacuum wand definition
wafer transport plane definition
wafer transport zone definition
wafer, control definition