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adhesion, resist edge definition
align expose definition
asher definition
ashing definition
bake definition
carbon tetrafluoride (CF4) definition
chemical amplification definition
chemical reversal definition
chemically amplified resist definition
coat definition
coater definition
comet definition
defect, photomask definition
dehydration bake definition
descum definition
developer definition
direct write definition
edge bead definition
electron beam lithography definition
glass locks definition
hard bake definition
hexamethyldisilazane (HMDS) definition
integrity definition
lead lock definition
linewidth, etched definition
linewidth, PR definition
operation definition
pattern, functional definition
photo lifting definition
photoresist (PR) definition
photoresist lifting definition
pinhole definition
post-exposure bake (PEB) definition
process zone definition
proximity X-ray definition
resist breakdown definition
resist cure definition
resist definition
resist edge adhesion definition
resist lifting definition
resist rings definition
resistance, chemical definition
resolution, usable definition
scum definition
scumming definition
soft bake definition
spin definition
spin webbing definition
splatter definition
starburst definition
striation definition
stripper definition
stripping definition
stripping solution definition
sulfuric acid (H2SO4) definition
surface imaging definition
undercutting definition
usable resolution definition
vapor prime definition
X-ray lithography definition
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