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abstraction definition
aspect ratio definition
Asymmetric Induction definition
basic cell definition
contaminant definition
dambar definition
defect definition
degating definition
degeneracy definition
design rules definition
extended light scatterer (XLS) definition
feature definition
feature group definition
feature size definition
gate feature definition
heterolysis, heterolytic definition
homolysis, homolytic definition
L-bar definition
linewidth, etched definition
linewidth, PR definition
localized light scatterer (LLS) definition
minimum feature size definition
nominal feature dimension definition
proton transfer reaction definition
Ritchie equation definition
standoff definition
striation definition
Z-direction definition
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