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acceptance testing definition
active equipment definition
actual equipment production definition
aggregation object definition
air atmosphere definition
alarm definition
application software definition
assist definition
atomic transfer definition
automated material handling system (AMHS) definition
automatic shutoff (ASO) definition
availability definition
available equipment capacity definition
balancing definition
bay definition
capability definition
capture definition
cassette module definition
cassette stage definition
chase definition
Chemical Hygiene Plan (CHP) definition
cleanroom interface chamber (CIC) definition
clock definition
coater definition
collection event definition
communication failure definition
communication fault definition
component object definition
control definition
core equipment set definition
cost of ownership (COO) definition
crossbar definition
cryogenic pump definition
cycle (equipment) definition
cycle time definition
datum point definition
developer definition
device ID definition
dilute definition
downtime (equipment) definition
dynamic port definition
earth port definition
edge sensor definition
electromagnetic compatibility (EMC) definition
electromagnetic interference (EMI) definition
ELF-sensitive equipment definition
ellipsometer definition
emergency off (EMO) definition
emergency off circuit (EMO) definition
enabled definition
engineering state definition
engineering time definition
equipment availability definition
equipment cycle definition
equipment definition
equipment dependent uptime definition
equipment downtime definition
equipment failure definition
equipment life cycle definition
equipment maintainability definition
equipment model definition
equipment reliability definition
equipment set definition
equipment states definition
equipment uptime definition

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