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alignment precision definition
arsine (AsH3) definition
autodoping definition
buried layer definition
crescents definition
dichlorosilane (H2SiCl2) definition
dopant definition
edge crown definition
effective layer thickness definition
epi profile slope definition
epitaxial definition
epitaxial layer definition
epitaxy (epi) definition
fishtails definition
flat zone definition
hydrogen (H2) definition
interface (IF) definition
pattern distortion ratio definition
pattern shift ratio definition
phosphine (PH3) definition
pre-epitaxial treatment definition
pyramid definition
sapphire definition
silane (SiH4) definition
silicon on sapphire (SOS) epitaxial wafer definition
silicon source gas definition
silicon tetrachloride (SiCl4) definition
spike definition
surface defects definition
thickness definition
transition width definition
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