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rotation definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
in dielectrically isolated (DI) wafers, the angle of deviation between the primary
flat
of the
DI wafer
and the X axis of the
photolithography
pattern. [SEMI M22-92]
See also:
RIE definition
+ retrocycloaddition definition
response time definition
risk definition
resolution dagger definition
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