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reticle definition

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a very flat glass plate that contains the patterns to be reproduced on a wafer; the image may be equal to or larger than the final projected image. Typical reticle substrate material is quartz, and typical magnifications are 10, 5, and 1 times final size. The reticle is used in a stepper.

See also:

runout definition
reverse micelle (or reversed micelle) definition
RTL definition
roadmap definition
RTY definition