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resist lifting definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
on a wafer, the loss of
adhesion
of a
resist
coating to its
substrate
. [SEMI P3-90] Also called photo lifting.
See also:
response curve definition
Rp, Sp definition
resistance, chemical definition
Resolution (chromatographic) definition
resolution, usable definition
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