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residue definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
any undesirable
material
that remains on a
substrate
after any
process
step
. [ASTM F127-84 and SEMI P3-90]
See also:
reply linking definition
Reaction Quotient definition
regioselectivity, regioselective definition
random logic device definition
reduction reaction definition
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