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reactive plasma deposition (RPD) definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
similar to CVD, except that an rf
plasma
helps the decomposition/recombination
process
of the
reactants
.
See also:
rel definition
rate-determining step, rate-limiting step definition
reactive ion etch (RIE) definition
reactive ion etch (RIE) definition
reference plane definition
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