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reactive ion etch (RIE) definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
a dry-etch
process
using electrical discharge to ionize and induce
ion
bombardment of the
wafer
surface
to obtain the required
etch
properties.
See also:
refractory metallization definition
regenerant definition
reportable quantity (RQ) definition
refractory metallization definition
request for information (RFI) definition
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