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reach definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
the distance measured from the
interface plane
to the
wafer
centroid (center of mass) within a
process module
or a
cassette
module
of a
cluster
tool
. [SEMI E21-94]
See also:
reaction coordinate definition
reference plane definition
reaction stage definition
rapid thermal annealing (RTA) definition
RC circuit definition
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