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purge manifold definition

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a piping/valving system designed to replace an undesirable gas in a piping system or vessel with a desirable gas by venting the undesirable gas and subsequently introducing the desirable gas. [SEMI Chemicals/Gases, Vol. 1, 1990 (no longer in print)]

See also:

quantum device definition
quadrupole mass filter definition
Q-value definition
queue time definition
Radionuclide definition