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proximity X-ray definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
a
lithography
method
using X-ray
radiation
through a
mask
close to, but not touching, the resist-coated
surface
of a silicon
wafer
. [1994 National Technology
Roadmap
for Semiconductors]
See also:
process-induced defect (PID) definition
projection definition
prostanoids definition
process zone definition
prober definition
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