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product definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
1: in
equipment
reliability, any
unit
intended to become a functional
semiconductor
device
. This definition includes functional engineering devices. [SEMI E10-92] 2: in
gas
source
control
equipment, the
gas
phase in the
cylinder
. [SEMI F13-93]
See also:
primary fiducial definition
protective clothing definition
protophilic (solvent) definition
+ pseudo-unimolecular definition
process program definition
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