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process module definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
in a
cluster
tool, a
module
that accepts or presents a single
wafer
inside the
module
for
intratool transport
(wafer movement inside the
cluster
tool). [SEMI E21-94]
See also:
Primary Voltaic Cells definition
prior equilibrium definition
process pressure definition
propellanes definition
prostanoids definition
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