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process gas definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
in the
calibration
of
mass
flow devices, the principal
gas
that the
user
requires the
device
to
control
or measure. [SEMI E29-93]
See also:
pseudo-catalysis definition
primary flow standard definition
programmable array logic (PAL) definition
programmable array logic (PAL) definition
prototropic rearrangement (or prototropy) definition
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