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1 : for a process under statistical process control, the sequence of steps performed to provide information about the manufacturing capability and natural variability in a portion of the manufacturing process. 2 : in particle counting, the set of events in which a single wafer or batch of wafers is cycled through the tool so an intentional process/chemical change is introduced to the surface or substrate of the wafer; the purpose is to determine particle contributions from the mechanical and process aspects of the process tool. [SEMI E14-93]
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