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in gas source control equipment (GSCE), the manufacturing tool that uses the product. POU is distinguished from the GSCE by having its own design criteria, a separate function, and a physical separation from the GSCE. [SEMI F13-93] 2 adj : refers to tool-specific air emissions abatement equipment; for example, thermal oxidizers are used in some facilities to control volatile organic carbon emissions from lithography track equipment. Can also refer to a gas supply mechanism located at the tool that avoids the risk associated with transporting and piping hazardous gases such as silane.
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