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plasma-enhanced TEOS oxide deposition definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
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X
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a
deposition
process
in which tetraethoxysilane (TEOS) is used as a silicon
source
to deposit silicon dioxide on a
wafer
surface
.
See also:
pOH definition
photophobia definition
physical property definition
pocket depth definition
pin grid array (PGA) definition
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