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pinhole definition
A
B
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D
E
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O
P
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1 : minute
defect
or
void
in a film, mask, or resist, usually the result of contaminants. 2 : a small
opening
that extends through a covering, such as a
resist
coating or an
oxide
layer
on a
wafer
. [SEMI P2-86]
See also:
pocked bead definition
piezoelectric effect definition
Pockel’s cell definition
pilot definition
photoelectron spectroscopy (PES) definition
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