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permeation leak definition
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in the measurement of
mass
flow controller
leak
rates, a
leak
caused by the movement of helium through gaskets, O-rings, polymers, or other materials through which helium can diffuse. [Adapted from SEMI E16-90] Also called diffusion
leak
.
See also:
Percent by Mass definition
peroxy acids definition
phosphine oxides definition
permeability, film definition
performance objective definition
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