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pattern, functional definition

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all of a class of images required for a specific fabrication step that employs a resist coating. In a typical base-oxide removal step for an integrated circuit, includes all base windows, resistor windows, anode windows, base test patterns, and alignment marks that appear on the integrated circuit layout. [ASTM F127-84]

See also:

passive devices definition
oxo acids definition
particulate contamination definition
pattern deformation definition
parting line protrusions or intrusions definition