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pattern shift ratio definition
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in silicon wafers, the lateral distance between the center point of the pattern on the
surface
of the
substrate
and the center point of the pattern on the
surface
of the
epitaxial
layer, divided by the
epitaxial
layer
thickness
. [SEMI M18-94]
See also:
Pascal’s triangle definition
pattern, test definition
oxide (Ox) definition
paramagnetic definition
passive transfer definition
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