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passive equipment definition
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
equipment
that is loaded or unloaded by the active
equipment
. [SEMI E23-91] Contrast active
equipment
.
See also:
PAH definition
owned object definition
pattern stitching accuracy definition
partial rate factor definition
oxygen (O2) definition
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