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parallelism tolerance definition
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in plastic and
metal
wafer
carriers, the minimum and maximum dimension allowance for the opposite sides of the pockets of a
wafer
carrier
to vary in relation to their distance from the
crossbar
end
of the
wafer
carrier
. [SEMI E1-86]
See also:
oxidizer gas definition
oxygen-free high-conductivity copper (OFHC) definition
partition coefficient definition
oximes definition
oxidative coupling definition
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