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packless valve definition
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a shutoff or
metering valve
designed to prevent escape of the
gas
by a static seal, such as a diaphragm or bellows, that isolates the controlled
gas
from the
atmosphere
. [SEMI International
Standards
1990, Vol. 1, Glossary]
See also:
passive equipment definition
parser definition
Paramagnetism definition
Oxidoreductase definition
particles per wafer pass (PWP) definition
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