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packed valve definition

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a shutoff or metering type of valve designed to prevent the gas it controls from escaping to the atmosphere. The escape of gas is prevented by means of a stem that rotates or moves within its seal material during actuation. The dynamic seal interface separates the medium from the atmosphere. [SEMI International Standards 1990, Vol. 1, Glossary]

See also:

Oxygen-evolving complex (OEC) definition
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oxylium ions definition
oxidation number definition
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